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AMAT 0050-38614
Product Name: Precision Gas Line Assembly
Product Description: A pre-fabricated, bent and welded stainless steel tubing assembly for direct gas line connections in semiconductor tools.
Technical Specifications:
- Material: Seamless 316L electropolished stainless steel tubing
Detailed content
- Fittings: VCR face-seal fittings for leak-tight, metal-to-metal seals
- Bend Radius: Precision CNC bending to minimize flow restriction
- Cleanliness: Class 1 cleanroom assembled and double-bagged
Functional Features:
- Ensures zero particle generation and leak-proof operation under UHP conditions.
- Ready-to-install, reducing field fabrication time and contamination risk.
- Compatible with high-purity corrosive and inert process gases.
Application Scenarios: Ultra-high purity gas distribution lines in AMAT chemical vapor deposition (CVD) systems.
