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AMAT 0050-37915 Gas Line Weldment Assembly
Product Description: A precision-engineered, leak-tight gas line weldment assembly designed for ultra-high-purity (UHP) gas delivery systems in semiconductor manufacturing. It provides a seamless, contamination-free pathway for process gases between gas panels and process chambers, ensuring consistent gas flow and purity.
Technical Specifications:
- Material: 316L electropolished stainless steel (Ra < 0.4 μm)
- Connection Type: VCR face-seal fittings (1/4″ & 3/8″ standard)
Detailed content
- Design Pressure: 250 PSIG (17.2 bar)
- Operating Temperature: -40°C to +120°C
- Leak Rate: < 1×10⁻⁹ atm·cc/s He
- Surface Finish: Electropolished (EP) for UHP compatibility
- Length: Custom-configurable (typical 300mm to 1200mm)
- Bend Radius: Minimum 3× tube OD for minimal flow restriction
- Compliance: SEMI C12, RoHS, CE
Functional Features:
- Zero dead-leg design eliminates gas trapping and contamination
- Electropolished interior minimizes particle generation and outgassing
- Precision TIG welding ensures structural integrity and leak tightness
- Compatible with all UHP semiconductor process gases (Ar, N₂, O₂, SiH₄, etc.)
- Resistant to corrosion from aggressive process chemistries
- Pre-fabricated for quick installation, reducing system downtime
- Fully passivated for immediate UHP service deployment
Application Scenarios:
- UHP gas distribution in CVD, ALD, and etch process chambers
- Gas panel to chamber delivery lines for specialty precursor gases
- Purge gas systems for load locks and transfer chambers
- Exhaust gas management for process byproduct removal
- Gas mixing manifolds for multi-gas process recipes
