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AMAT 0050-37557
Product Name: Precision Gas Flow Restrictor Assembly
Product Description: A fixed-orifice flow restrictor designed to provide precise, stable gas flow regulation for low-flow process gas applications in semiconductor manufacturing.
Technical Specifications:
- Material: 316L stainless steel (wetted parts)
Detailed content
- Orifice Diameter: 0.075 mm (±0.001 mm)
- Flow Coefficient (Cv): 0.0008
- Pressure Range: 0–150 PSIG
- Temperature Range: -40°C to +120°C
- Connection: 1/4″ VCR male/female
- Surface Finish: Electropolished (Ra ≤ 0.2 μm)
- Leak Rate: <1×10⁻⁹ atm-cc/sec He
Functional Features:
- Ultra-precise, drift-free flow control for critical low-flow processes
- Inert construction compatible with all high-purity gases
- Compact, inline design for space-constrained installations
- Welded, leak-tight construction for reliability
- Single-piece, non-clogging orifice for long service life
Application Scenarios: Precision flow limitation for purge gases, carrier gases, and dopant gases (Ar, H₂, PH₃, B₂H₆) in AMAT process gas delivery systems.
