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AMAT 0050-37273
Product Name: Ultra-High Purity (UHP) Gas Line Weldment / Tubing Assembly
Product Description: A custom-fabricated stainless steel tubing assembly for the safe and clean delivery of ultra-high purity process gases in semiconductor fabrication. It features precision welding and electropolishing.
Technical Specifications:
- Material: 316L VIM/VAR stainless steel tubing.
Detailed content
- Internal Finish: Electropolished to a Ra < 0.5μm surface finish for ultra-clean service.
- Construction: All-welded, crevice-free construction with no internal gaps.
- Fittings: Welded connections or face-seal fittings (VCR or Swagelok SDR).
- Cleaning: Class 10 cleanroom assembled, double-bagged, and vacuum-packed.
- Pressure Rating: Designed for 2000+ psig operating pressure.
Functional Features:
- Zero particle generation or entrapment due to smooth internal bore.
- Leak-tight integrity under high-pressure and vibration conditions.
- High corrosion resistance to aggressive specialty gases (e.g., WF₆, BCl₃, NH₃).
- Precisely bent and sized for exact fit, eliminating installation errors.
Application Scenarios:
- Transfers process gases from gas panels to deposition and etch chambers.
- Used in gas distribution systems across all major AMAT semiconductor platforms.
