Digital guide
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AMAT 0050-37127
- Brand & Part Number: Applied Materials (AMAT) 0050-37127
- Product Name: Precision Flow Meter Module
- Product Description: A high-precision digital flow meter module designed for accurate measurement and monitoring of process gases in semiconductor manufacturing. It delivers real-time flow data with exceptional repeatability for process gas control systems.
Detailed content
- Technical Specifications:
- Measurement Principle: Thermal mass flow sensing
- Flow Range: 0-10 slm (standard liters per minute)
- Accuracy: ±0.5% full scale
- Repeatability: ±0.1% full scale
- Output: 4-20mA + RS-485 digital
- Operating Pressure: Up to 150 PSI
- Wetted Materials: 316L stainless steel, Hastelloy C-22
- Operating Temperature: 0°C to +50°C
- Functional Features:
- High-precision flow measurement for critical process gases
- Fast response time for dynamic flow control
- Multi-parameter output for flexible system integration
- Comprehensive self-diagnostics and fault reporting
- Ultra-high purity wetted components prevent contamination
- Digital communication enables remote monitoring and control
- Applications:
- Process gas flow measurement in CVD and ALD systems
- Gas delivery control for AMAT Centura platforms
- High-purity specialty gas monitoring
- Semiconductor manufacturing requiring precise gas flow control
