Digital guide
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AMAT 0050-36463
Product Name: Vacuum Fitting/Adapter Component
Product Introduction: A precision-engineered vacuum fitting or adapter used in gas delivery and vacuum systems of semiconductor manufacturing tools.
Technical Specifications:
- Material: 316L stainless steel or other high-purity alloy
Detailed content
- Connection Type: VCR, Mini CF, or other industry-standard vacuum connections
- Design: Optimized for specific flow path requirements
- Pressure Rating: Compatible with high-vacuum and process pressure conditions
- Surface Finish: Electropolished for minimal particle generation
Functional Features:
- Provides leak-tight connections in vacuum and gas delivery systems
- Resists corrosion from process gases and cleaning chemicals
- Precision machining for exact fit and alignment
- Compatible with standard vacuum assembly techniques
- Long-term reliability in dynamic pressure environments
Application Scenarios:
- Gas delivery systems in semiconductor process tools
- Vacuum line connections in PVD, CVD, and etch processes
- Adapter applications between different vacuum fitting standards
- Replacement part for AMAT semiconductor manufacturing equipment maintenance
