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AMAT 0050-35629
Product Name: Precision Diaphragm Valve
Product Description: A high-purity, normally closed pneumatic diaphragm valve for precise on/off control of ultra-high-purity gases and chemicals in semiconductor process systems.
Technical Specifications:
- Valve Type: Pneumatic, 2-way, normally closed
Detailed content
- Orifice Size: 6mm
- Connection: 1/4″ VCR
- Wetted Materials: 316L SS, PTFE, Kalrez
- Actuator Pressure: 4-6 bar
- Operating Temperature: -10°C to +100°C
- Leak Rate: < 1×10⁻⁹ atm-cc/sec He
- Cycle Life: > 1,000,000 cycles
Functional Features:
- Zero dead volume for minimal gas retention
- Full-flow design for low pressure drop
- Corrosion-resistant wetted parts
- Smooth, crevice-free internal bore
- Quick-change diaphragm for easy maintenance
Application Scenarios: High-purity gas and chemical delivery in AMAT gas panels, chemical delivery systems (CDS), and process chambers.
