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AMAT 0050-34811
Product Name: Ultra-High-Purity Gas Weldment Manifold
Product Description: A precision-welded stainless steel manifold designed for distributing ultra-high-purity process gases to multiple process chambers, ensuring leak-tight, contamination-free gas delivery.
Technical Specifications:
- Material: 316L VIM-VAR stainless steel (electropolished)
Detailed content
- Configuration: 4-port, 1/4″ VCR face-seal connections
- Flow Path: Internal drilled, crevice-free design
- Pressure Rating: 200 PSIG
- Temperature Range: -40°C to +120°C
- Surface Finish: Ra ≤ 0.2 μm (internal)
- Leak Rate: <1×10⁻⁹ atm-cc/sec He
- Dimensions: 120 mm (L) × 80 mm (W) × 30 mm (H)
Functional Features:
- Full material compatibility with corrosive specialty gases (SiH₄, NH₃, NF₃)
- Zero dead volume to minimize gas retention and cross-contamination
- Compact, rigid design for stable mounting in gas panels
- Electropolished interior for low outgassing and easy cleanability
- Precisely aligned ports for uniform flow distribution
Application Scenarios: Gas distribution manifolds in AMAT gas cabinets, distribution panels, and process gas lines for 300mm wafer fabrication.
