Digital guide
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AMAT 0050-31222
Product Name: Ultra-High Purity (UHP) Gas Line Adapter Assembly
Product Description: A precision-machined fitting designed for secure, leak-tight connections in ultra-high purity gas delivery systems within semiconductor manufacturing tools.
Technical Specifications:
- Material: 316L VIM/VAR stainless steel
Detailed content
- Connection Type: Face-seal VCR fitting
- Pressure Rating: Vacuum to 250 PSIG
- Surface Finish: Electropolished (Ra < 0.5μm)
- Configuration: Straight-through adapter
Functional Features:
- Ensures zero virtual leaks and maintains UHP gas integrity.
- Metal-to-metal sealing for reliable performance under thermal cycling.
- Cleanroom-compatible, low particle generation design.
- Fully passivated surface to prevent corrosion and contamination.
Application Scenarios: Gas line connections for corrosive and inert gases (Ar, N₂, H₂, NF₃) in process tool gas panels and distribution manifolds.
