Digital guide
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AMAT 0050-25949
Product Name: Chamber View Port / Optical Window
Product Introduction: A transparent assembly installed in the chamber wall or lid to allow visual inspection, optical pyrometry, or laser-based diagnostics to monitor the process inside the vacuum chamber.
Technical Specifications:
- Window Material: Fused Silica (Quartz), Sapphire, or Borosilicate Glass.
Detailed content
- Thickness: 5mm to 20mm (dependent on pressure differential).
- AR Coating: Anti-Reflective coating for specific wavelengths (e.g., 633nm for HeNe lasers).
- Viewing Angle: 0° (straight through) or 45° (angled for side view).
- Pressure Rating: Full vacuum to 15 PSI positive pressure.
Functional Features: - Plasma Viewing: Allows cameras to see wafer color and plasma uniformity.
- Optical Access: Provides a path for interferometry, ellipsometry, or pyrometry lasers.
- Deposition Shield: Often includes a ring of gas or a shutter mechanism to blow clean gas across the window to prevent coating.
- UV Transmission: High transmission quartz for UV-based endpoint detection.
Application Scenarios: - Endpoint Detection: Optical sensors look for color changes in the plasma or on the wafer to stop the etch process.
- Pyrometry: Measures wafer temperature through the window without physical contact.
- Preventive Maintenance: Allows operators to visually check for arcing, sputtering on shields, or wafer breakage.
- In-Situ Metrology: Used for real-time thickness monitoring during deposition.
