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AMAT 0050-10093
Product Name: Precision Fluid Adapter Assembly
Product Description: High-purity stainless steel adapter for fluid and gas connections in semiconductor process utility systems.
Technical Specifications:
- Material: 316L VIM-VAR stainless steel
- Surface finish: Ra ≤ 0.38 μm (15 μin.) electropolished
Detailed content
- Connection types: VCR-style face seal fittings
- Pressure rating: Vacuum to 200 PSI
- Temperature range: -73°C to +450°C
- All-welded construction for leak-tight performance
Functional Features:
- Ultra-high purity design for semiconductor processes
- Excellent corrosion resistance to process chemicals
- Metal-to-metal sealing for zero leakage
- Easy installation and secure connections
- Full material traceability to SEMI standards
Application Scenarios:
- High-purity chemical delivery systems
- Process gas line connections
- Semiconductor wet bench utility interfaces
- Ultra-high purity fluid handling subsystems
