Digital guide
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AMAT 0050-09387
Product Name: Gas Injection Nozzle Assembly
Product Description: A precision flow control component used to inject process gases into reaction chambers in a controlled and uniform manner, ensuring stable gas distribution and consistent process results.
Technical Specifications:
- Material: 316L stainless steel or high-purity quartz
Detailed content
- Orifice Precision: Micro-machined nozzles with tolerance ±0.01mm
- Flow Characteristics: Laminar flow design to avoid turbulence
- Surface Finish: Electropolished or fire-polished to reduce adhesion
- Compatibility: Suitable for corrosive and oxidizing process gases
Functional Features:
- Delivers uniform gas distribution across the wafer surface
- Prevents gas jet impact that causes uneven processing
- Resists clogging from precursor deposition and byproducts
- High chemical compatibility with a wide range of process gases
- Optimized flow path to improve process repeatability
Application Scenarios: Used in CVD, ALD, etching and cleaning chambers for precise process gas delivery in semiconductor wafer manufacturing.
