Digital guide
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AMAT 0050-09380
- Brand & Part Number: Applied Materials (AMAT) 0050-09380
- Product Name: High-Purity Gas Line Weldment Assembly
- Product Description: A precision-welded, ultra-high-purity gas delivery line assembly for transporting specialty process gases in semiconductor manufacturing. It ensures contamination-free gas flow with zero leakage in demanding vacuum and process environments.
Detailed content
- Technical Specifications:
- Material: Electropolished 316L stainless steel tubing
- Surface Finish: Internal electropolish to Ra ≤ 0.5 μm (ultra-smooth)
- Fitting Type: VCR face-seal metal gasket connections
- Pressure Rating: 0–300 PSI
- Leak Integrity: Helium leak rate ≤ 1×10⁻⁹ atm-cc/s
- Bend Radius: Precision-formed to minimize flow restriction
- Functional Features:
- Ultra-clean design eliminates particle generation and outgassing
- Full-penetration precision welding ensures structural integrity
- Passivated interior surface prevents gas adsorption/desorption
- Corrosion-resistant to all standard semiconductor process gases
- Flexible configurations to fit complex equipment routing
- Applications:
- High-purity gas distribution for CVD, PVD, ALD, and etch processes
- Process gas delivery in AMAT Centura, Producer, and Endura systems
- Corrosive, oxidizing, and pyrophoric gas transport in semiconductor fabs
