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AMAT 0050-03448
Product Name: 4-Valve Manifold Weldment Assembly
Product Description: Integrated gas distribution manifold with four integrated valves for ultra-high purity fluid control in semiconductor process systems.
Technical Specifications:
- Material: 316L electropolished stainless steel
Detailed content
- Valve Type: Veriflo high-purity diaphragm valves
- Configuration: 4-valve manifold with common inlet
- Pressure Rating: Vacuum to 150 PSI
- Connection Type: VCR face seal fittings
- Surface Finish: Ra ≤ 0.38μm (15μin.) electropolished
- Dimensions: 200mm × 150mm × 80mm
Functional Features:
- Compact integrated design minimizes space requirements
- Leak-tight performance for ultra-high purity gas delivery
- Low particle generation and outgassing characteristics
- Easy installation and maintenance access
- Corrosion resistance to all standard process gases
Application Scenarios:
- Ultra-high purity gas distribution in semiconductor fabs
- Chemical vapor deposition (CVD) gas delivery systems
- Process chamber gas injection control
- Centura and Producer platform gas panels
