Digital guide
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AMAT 0050-00160
Product Name: UHP Pressure Regulator Assembly
Product Description: A precision, two-stage pressure regulator designed for the stable control of ultra-high purity (UHP) process gases in semiconductor gas distribution systems.
Technical Specifications:
- Inlet Pressure: Up to 3000 PSIG
Detailed content
- Outlet Pressure Range: 10-100 PSIG
- Material: 316L stainless steel, diaphragm-controlled
- Cv Value: 0.1
- Leak Rate: < 1 x 10⁻⁹ atm-cc/sec He
Functional Features:
- Delivers extremely stable outlet pressure, independent of inlet pressure fluctuations.
- Diaphragm design eliminates internal leaks and contamination.
- All wetted parts electropolished for UHP compatibility.
- Integral filter for particulate protection.
Application Scenarios: Control of corrosive, toxic, and inert specialty gases (BCl₃, SiH₄, NH₃, Ar) in gas cabinets and process tool gas panels.
