Digital guide
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AMAT 0050-00136
Product Name: Precision Flow Restrictor Orifice
Product Description: A micro-machined, fixed-flow restriction device used to precisely control and limit gas flow rates in high-purity semiconductor gas delivery systems.
Technical Specifications:
- Material: 316L VIM-VAR Stainless Steel
Detailed content
- Orifice Diameter: 0.15mm (±0.001mm)
- Flow Coefficient (Cv): 0.001
- Pressure Range: 0 – 100 PSIG
- Temperature Range: -40°C to +120°C
- Connection: 1/4″ VCR face-seal fittings
- Surface Finish: Electropolished (Ra ≤ 0.2μm)
- Leak Rate: < 1×10⁻⁹ atm-cc/sec He
Functional Features:
- Ultra-precise flow control for critical gas processes
- Fixed orifice design for consistent, drift-free performance
- Full material compatibility with ultra-high-purity gases
- Welded, leak-tight construction
- Compact design for space-constrained gas panels
Application Scenarios: Precision flow limitation for carrier gases, purge gases, and process gases (Ar, N₂, H₂, SiH₄) in gas distribution panels and process gas lines.
