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AMAT 0045-00250
Product Name: Precision Machined Aluminum Vacuum Chamber Blanket
Product Description: High-precision aluminum structural component designed for vacuum chamber assembly and sealing in semiconductor manufacturing equipment.
Technical Specifications:
- Material: 6061-T6 aluminum alloy
Detailed content
- Surface Finish: Electropolished (Ra ≤ 0.8μm)
- Dimensions: Precision-machined to 300mm chamber specifications
- Flatness Tolerance: ≤ 0.01mm across entire surface
- Hardness: HB 95-105
- Fastener Compatibility: M6 x 1.0 threaded holes
Functional Features:
- Provides vacuum-tight sealing interface for process chamber components
- High structural rigidity maintains dimensional stability under vacuum conditions
- Excellent thermal conductivity for uniform heat distribution
- Low outgassing properties suitable for high-vacuum environments
- Corrosion resistance to standard semiconductor process chemicals
Application Scenarios:
- Vacuum chamber sealing in Centura PVD systems
- Structural interface between chamber body and lid assemblies
- High-vacuum semiconductor process equipment
- Endura platform chamber components
