Digital guide
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AMAT 0041-97272
- Brand & Part Number: Applied Materials (AMAT) 0041-97272
- Product Name: Reflector Plate Assembly
- Product Description: A precision-engineered metallic reflector plate assembly designed for semiconductor process chambers. It is used to reflect and distribute thermal radiation uniformly across the wafer surface, ensuring consistent temperature distribution during high-temperature thermal processes.
Detailed content
- Technical Specifications:
- Material: High-purity, thermally stable aluminum alloy (6061-T6)
- Surface Treatment: Highly reflective, polished finish (Ra ≤ 0.8 μm)
- Dimensions: Custom-machined to fit specific chamber geometry (typically 300mm platform compatible)
- Mounting: Precision-drilled mounting holes for secure fixture
- Operating Temperature: Up to 600°C
- Functional Features:
- Optimized geometry for uniform thermal radiation distribution
- High reflectivity across infrared spectrum for efficient heat transfer
- Low thermal expansion for dimensional stability at high temperatures
- Smooth, non-porous surface prevents particle generation and contamination
- Easy to install and align for consistent process performance
- Applications:
- Rapid Thermal Processing (RTP) chambers
- Annealing and oxidation processes in AMAT Centura and Endura platforms
- Wafer heating systems requiring uniform thermal distribution
