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AMAT 0041-93175
Product Name: Turbo Pump Interface / Adapter Flange
Product Description: A precision-machined transition flange that provides a vacuum-tight connection between the process chamber and high-speed turbomolecular vacuum pump. It ensures alignment, structural support, and maintains UHV integrity.
Technical Specifications:
- Material: Forged aluminum alloy 6061-T6 / 316L stainless steel
Detailed content
- Flange Standards: ISO-160 / ISO-200 (depending on pump model)
- Surface Finish: Ra < 0.8 μm on sealing surfaces
- Centering: Precision machined lip for pump/chamber alignment
- Porting: Includes integrated purge gas / venting passages
- Bolt Pattern: Standardized for compatibility with major turbo pump brands
- Leak Rate: < 5 x 10⁻¹⁰ mbar·l/s
Key Features:
- Precision alignment ensures optimal pump performance and bearing life
- Integrated gas passages simplify purge and vent operations
- Rigid design minimizes vibration transfer to process chamber
- Optimized conductance for maximum pumping speed
- Compatible with both heated and unheated pump configurations
Application Scenarios:
Used across all AMAT platforms (Endura, Centura, Producer) to interface high-vacuum turbo pumps with process chambers. Found in deposition, etch, and metrology modules requiring UHV conditions.
