Digital guide
You are here:
AMAT 0041-90952
- Brand & Part Number: Applied Materials (AMAT) 0041-90952
- Product Name: Electrostatic Chuck (ESC) Power Cable Assembly
- Product Description: A high-voltage, high-performance power cable assembly designed for electrostatic chuck (ESC) systems in semiconductor process chambers. It delivers stable high-voltage power while maintaining excellent electrical isolation in high-vacuum environments.
Detailed content
- Technical Specifications:
- Conductor: 12 AWG high-purity stranded copper
- Voltage Rating: 5kV DC continuous
- Insulation: Cross-linked polyethylene (XLPE) with PTFE jacket
- Shielding: Dual-layer copper braid for EMI/RFI suppression
- Length: 5.0 meters
- Connector Type: High-voltage vacuum feedthrough connectors
- Temperature Range: -40°C to +125°C
- Leak Rate: ≤ 1×10⁻⁹ atm-cc/s He
- Functional Features:
- Superior dielectric insulation for high-voltage ESC operation
- Dual-layer shielding eliminates electromagnetic interference
- High-temperature resistance maintains performance in process environments
- Vacuum-compatible materials with ultra-low outgassing
- Flex-resistant construction withstands repeated installation cycles
- Locking connectors prevent accidental disconnection
- Applications:
- High-voltage power delivery to electrostatic chuck (ESC) assemblies
- Power interfacing in PVD, CVD, and etch chambers
- AMAT Endura and Centura platform ESC systems
- High-vacuum processes requiring electrostatic wafer clamping
