Digital guide
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AMAT 0041-64512
Product Name: High-Purity Gas Filter Assembly
Product Description: A precision-engineered ultra-high purity gas filter designed to remove particulates and contaminants from process and purge gas streams in semiconductor manufacturing systems.
Technical Specifications:
- Material: 316L VIM/VAR electropolished stainless steel
Detailed content
- Filter Element: Porous metal with 0.003μm absolute rating
- Connection Type: 1/4″ VCR face-seal fittings
- Pressure Rating: Vacuum to 250 PSIG
- Operating Temperature: -40°C to +120°C
Functional Features:
- Delivers high-efficiency particulate removal for UHP gas applications.
- Low pressure drop design maintains optimal gas flow rates.
- Sealed all-welded construction eliminates virtual leaks.
- Cleanroom packaged and pre-baked for outgassing reduction.
Application Scenarios: Purification of inert, corrosive, and reactive gases (Ar, N₂, H₂, SiH₄, NF₃) in gas distribution panels and process tool gas lines.
