Digital guide
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AMAT 0041-49938
- Product Name: Electrostatic Chuck (ESC) Insulator Ring
- Product Description: High-performance dielectric insulator ring for electrostatic chuck assemblies. It provides electrical isolation between the chuck electrode and chamber ground while maintaining thermal stability.
- Technical Specifications:
- Material: Boron Nitride (BN) Ceramic Composite
Detailed content
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- Inner Diameter: 296mm
- Outer Diameter: 320mm
- Thickness: 8mm
- Dielectric Constant: 4.5
- Max Operating Temperature: 800°C
- Thermal Conductivity: 40 W/m·K
- Functional Features:
- Exceptional high-voltage dielectric isolation
- Excellent thermal conductivity for efficient heat dissipation
- Low plasma erosion rate in reactive ion etch (RIE) environments
- Non-contaminating, ultra-smooth surface
- High mechanical strength and dimensional stability
- Chemical inertness to all semiconductor process gases
- Applications: Insulator for 300mm electrostatic chucks (ESC) in PVD and Etch chambers; critical component for maintaining chuck voltage isolation.
