Digital guide
You are here:
AMAT 0041-28291
Product Name: RF Power Feedthrough Assembly
Product Description: A high-voltage radio frequency power feedthrough designed to transmit RF power from external generators into vacuum process chambers.
Technical Specifications:
- Frequency Rating: 0 to 30 MHz (optimized for 13.56 MHz)
Detailed content
- Voltage Rating: 5kV RMS continuous
- Insulator Material: High-purity alumina ceramic
- Conductor: Oxygen-free copper with nickel plating
- Mounting: 2.75″ ConFlat (CF) flange
- Leak Rate: <1×10⁻⁹ std cc/sec He
Functional Features:
- Provides hermetic vacuum seal while transmitting high-power RF signals.
- Low insertion loss ensures maximum power transfer efficiency.
- High dielectric strength prevents arcing in high-vacuum environments.
- Compatibility with standard RF matching networks.
Application Scenarios: RF power delivery for plasma generation in PECVD, RIE etch, and sputtering PVD chambers.
