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AMAT 0041-27064CW
Brand & Part Number: Applied Materials (AMAT) 0041-27064CW
Product Name: Quartz Liner Cover Assembly
Product Description: A high‑purity quartz protective component used to shield chamber interiors and maintain clean process environments in thermal processing systems.
Detailed content
Technical Specifications:
- Material: High‑purity synthetic fused silica quartz
- Purity: >99.999% SiO₂
- Maximum Operating Temperature: 1100°C
- Dimensional Tolerance: ±0.05mm
- Surface Finish: Polished to reduce particle generation
Functional Features:
- Ultra‑low metallic contamination to protect wafer quality
- Excellent thermal shock resistance
- High transmittance for infrared heating systems
- Chemical inertness to oxidizing and inert atmospheres
- Low outgassing under high vacuum and high temperature
Application: Used in oxidation, diffusion, annealing, and LPCVD chambers to isolate process zones and prevent contamination.
