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AMAT 0041-26063
Brand & Part Number: Applied Materials (AMAT) 0041-26063
Product Name: Quartz Chamber Liner
Product Description: A one-piece, high-purity fused silica quartz liner designed for use in high-temperature thermal process chambers, providing a clean, inert process environment.
Detailed content
Technical Specifications:
- Material: High-purity synthetic fused silica quartz (SiO₂ > 99.999%)
- Maximum Operating Temperature: 1,100°C
- Thermal Expansion Coefficient: ~5.5 × 10⁻⁷ /°C
- Wall Thickness: 3–5 mm (precision controlled)
- Dimensional Tolerance: ± 0.05 mm
- Optical Transmittance: > 90% for infrared wavelengths
Functional Features:
- Ultra-low metallic contamination to ensure wafer surface purity
- Excellent thermal shock resistance to withstand rapid heating/cooling cycles
- High infrared transmittance for efficient radiant heating
- Chemical inertness to oxidizing, inert, and reducing atmospheres
- Low outgassing under high vacuum and high-temperature conditions
Application: Used in vertical diffusion, oxidation, annealing, and LPCVD chambers to isolate process zones and prevent cross-contamination.
