Digital guide
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AMAT 0041-07790
- Product Name: Electrostatic Chuck (ESC) Cover Ring
- Product Description: A precision-machined ring that surrounds the electrostatic chuck, providing a uniform edge profile and protecting the ESC from process contamination.
- Technical Specifications:
- Material: Silicon Carbide (SiC) Ceramic Composite
Detailed content
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- Inner Diameter: 298mm
- Outer Diameter: 325mm
- Thickness: 6mm
- Hardness: 2800 HV (Vickers)
- Max Operating Temperature: 600°C
- Surface Finish: Ra < 0.4 μm
- Functional Features:
- Exceptional wear resistance in high-density plasma
- Chemical inertness to all semiconductor process gases
- Ultra-smooth surface prevents particle generation
- Perfect dimensional stability at high temperatures
- Low thermal expansion for tight tolerance retention
- Direct drop-in replacement for OEM components
- Applications: Edge ring for 300mm electrostatic chucks in PVD & Etch chambers; critical for uniform wafer clamping and process uniformity.
