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AMAT 0041-04789
Product Name: High-Purity Process Gas Line Assembly
Product Description: A precision-engineered, ultra-clean gas delivery line assembly for transporting high-purity process gases (e.g., precursors, carrier gases) into semiconductor process chambers. Designed for zero contamination and precise flow control.
Technical Specifications:
- Material: 316L VIM/VAR Stainless Steel, electropolished (EP) internally
Detailed content
- Inner Surface Finish: Ra ≤ 10 μin (0.25 μm)
- Fitting Type: Orbital welded VCR (Metal Gasket Face Seal) connections
- Pressure Rating: 3000 psig (207 bar)
- Length: Custom-configurable (typically 12-24 inches)
- Bore Size: 1/4″ or 3/8″ OD
Functional Features:
- Electropolished interior minimizes particle entrapment and enables efficient purging
- Orbital welded joints ensure leak-tight integrity (Helium leak rate < 1 x 10⁻⁹ atm·cc/sec)
- Fully passivated for corrosion resistance against aggressive gases
- Flexible design with bend radii optimized for gas flow
- Compatible with UHP (Ultra-High Purity) gas systems
Application Scenarios: Deployed in gas cabinets, gas panels, and process tool interfaces for delivering UHP gases like SiH₄, NH₃, WF₆, Cl₂, and Ar in CVD, ALD, and Etch processes.
