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AMAT 0040-99333
- Product Name: Adaptor, Chamber Component Mounting
- Product Description: Precision-engineered mechanical adapter for secure mounting and alignment of critical components within semiconductor process chambers.
- Technical Specifications:
- Material: 316L stainless steel with electropolished finish
Detailed content
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- Surface Roughness: Ra ≤ 0.8μm
- Flatness Tolerance: ±0.01mm across mounting surface
- Fastener Compatibility: M5 socket head cap screws (vacuum-compatible)
- Load Capacity: 35kg static load rating
- Functional Features:
- Ensures precise component alignment for process uniformity
- Crevice-free design minimizes particle entrapment risks
- High corrosion resistance to process chemistries
- Easy installation with precision locating pins
- Compatible with ultra-high vacuum environments
- Application Scenarios:
- Used in AMAT Centura and Producer chambers for component mounting
- Applied in PVD, CVD, and etch processes
- Deployed for mounting gas distribution components and sensors
- Utilized in both 200mm and 300mm wafer processing equipment
