Digital guide
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Technical Specifications:
- Material: 5083 aluminum alloy
- Sealing: Integral Viton O-ring groove
- Viewport: Optional fused silica window (for optical access)
- Leak Integrity: < 1 × 10⁻⁹ atm-cc/sec He
Functional Features:
- Robust, vacuum-tight seal under all operating conditions
- Integrated safety interlock mechanism
- Smooth internal surfaces minimize particle traps
- Easy to open and close for chamber service
Application: Serves as the main access door for Etch and CVD chambers (Centura platforms).
