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AMAT 0040-90006
- Product Name: Chamber Shield Liner Assembly
- Product Description: A multi-piece, high-purity aluminum chamber shield/liner set that protects the chamber walls from deposition and plasma damage, ensuring process cleanliness.
- Technical Specifications:
- Material: 6061-T6 aluminum, hard-anodized (50μm thickness).
Detailed content
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- Coverage: Full-wall coverage for 300mm process chamber.
- Fit: Precision-machined to snap-fit without fasteners.
- Coating: Optional Yttrium oxide (Y2O3) plasma-sprayed coating for etch applications.
- Functional Features:
- Collects deposited films to prevent flaking and particle contamination.
- Easily replaceable to extend chamber maintenance intervals.
- Minimizes chamber wall “memory effect” between processes.
- Enhances plasma uniformity and process repeatability.
- Application Scenarios: Used in PVD (Copper, Barrier, Seed) and ALD chambers on the Endura 300mm platform.
