Digital guide
You are here:
AMAT 0040-86514
Product Name: High-Purity Quartz Pedestal Support Ring
Product Description: A precision-machined fused quartz component designed to support and insulate wafer pedestals in semiconductor PVD chambers, ensuring stable wafer positioning and electrical isolation during high-vacuum deposition processes.
Technical Specifications:
- Material: High-purity synthetic fused silica (SiO₂), purity ≥99.99%
Detailed content
- Structure: Flat annular ring with precision-machined mounting holes
- Surface Finish: Fire-polished, Ra ≤0.3μm
- Temperature Resistance: Continuous operation up to 1100°C
- Dimensional Tolerance: ±0.01mm for inner/outer diameter and thickness
Functional Features:
- Provides excellent electrical isolation between pedestal and chamber components
- Chemically inert to prevent contamination in titanium PVD processes
- Exceptional thermal shock resistance to withstand rapid heating/cooling cycles
- Ultra-low outgassing for UHV compatibility
- High mechanical stability to maintain pedestal alignment
Application Scenarios: Deployed in Endura II platforms, specifically in EXTENSA Ti PVD chambers for 200mm/300mm wafer processes.
