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AMAT 0040-84937
Brand & Part Number: Applied Materials (AMAT) 0040-84937
Product Name: Chamber Body Insert Liner
Product Description: A precision-machined cylindrical liner installed within the main process chamber to protect the chamber body from plasma erosion, chemical corrosion, and thin-film deposition buildup.
Detailed content
Technical Specifications:
- Material: 5083 aluminum alloy, hard anodized coating
- Coating Thickness: 25 ± 5 μm
- Surface Finish: Electropolished internal surface, Ra ≤ 0.5 μm
- Vacuum Compatibility: UHV-rated, leak rate < 1 × 10⁻⁹ atm-cc/sec He
- Operating Temperature: Up to 300°C
Functional Features:
- Smooth, non-particulating surface to minimize particle traps and contamination
- High resistance to plasma sputtering and corrosive process gases
- Precision-machined profile for optimal gas flow and plasma uniformity
- Lightweight construction for easy installation and replacement during maintenance
- Structural rigidity to maintain chamber vacuum integrity
Application: Deployed in 200mm/300mm PVD and Etch chambers (Endura, Centura platforms) to extend chamber service life and maintain process consistency.
