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AMAT 0040-76652
Brand & Part Number: Applied Materials (AMAT) 0040-76652
Product Name: Chamber Liner Shield Assembly
Product Description: A one-piece cylindrical liner installed inside process chambers to protect the chamber body from plasma erosion, chemical corrosion, and thin-film deposition buildup.
Detailed content
Technical Specifications:
- Material: 5083 aluminum alloy with plasma-resistant coating
- Coating Thickness: 30 μm (anodized + sprayed composite)
- Surface Finish: Electropolished interior, Ra ≤ 0.5 μm
- Vacuum Compatibility: UHV-rated
- Operating Temperature: Up to 300°C
- Dimensional Tolerance: ± 0.05 mm
Functional Features:
- High resistance to plasma sputtering and chemical attack
- Smooth non-particulating surface to minimize contamination
- Optimized geometry for uniform gas flow distribution
- Structural rigidity to maintain vacuum integrity
- Easy installation and replacement as a consumable part
Application: Used in 200mm/300mm PVD and Etch chambers to extend chamber service life and reduce cleaning frequency.
