Digital guide
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AMAT 0040-75531
- Brand & Part Number: Applied Materials (AMAT) 0040-75531
- Product Name: ESC (Electrostatic Chuck) Cover Assembly
- Product Description: A protective cover assembly for electrostatic chucks (ESC) in semiconductor process chambers. It shields the ESC from process contamination, prevents electrical arcing, and maintains consistent wafer clamping performance.
Detailed content
- Technical Specifications:
- Material: High-performance engineering ceramic (Al₂O₃ or AlN)
- Dielectric Strength: ≥ 12 kV/mm
- Surface Roughness: Ra ≤ 0.4 μm (polished)
- Thermal Conductivity: ≥ 25 W/m·K
- Wafer Size Compatibility: 200mm/300mm
- Coefficient of Thermal Expansion: Matches silicon wafer properties
- Functional Features:
- Excellent dielectric insulation for high-voltage ESC operation
- High thermal conductivity for efficient heat transfer to wafer
- Chemical resistance to plasma and process gases
- Non-contaminating, ultra-smooth surface prevents wafer defects
- Dimensional stability across wide temperature ranges
- Precision-machined for perfect alignment with ESC assembly
- Applications:
- Electrostatic chuck protection in PVD, CVD, and etch chambers
- AMAT Endura, Centura, and Producer ESC systems
- High-vacuum semiconductor processes requiring wafer clamping
