Digital guide
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AMAT 0040-70328
- Brand & Part Number: Applied Materials (AMAT) 0040-70328
- Product Name: Source Frame Alignment Plate
- Product Description: A precision-machined structural alignment plate for securing and positioning the source assembly within PVD chambers. It maintains critical mechanical alignment between target, shield, and wafer pedestal for consistent deposition uniformity.
Detailed content
- Technical Specifications:
- Material: 6061-T6 aluminum alloy
- Surface Treatment: Hard anodized (30μm)
- Dimensions: 450mm × 450mm × 12mm
- Flatness: ≤ 8μm across entire surface
- Mounting Holes: 8 precision-tapped M6 holes
- Alignment Pins: 2 precision-ground stainless steel pins (±5μm)
- Weight: 4.8kg
- Functional Features:
- Precision alignment ensures consistent target-to-wafer distance
- Rigid construction minimizes mechanical drift
- Anodized surface resists corrosion and particle generation
- Precision pin alignment guarantees accurate assembly positioning
- Optimized weight distribution maintains chamber balance
- Direct-fit compatibility with original equipment design
- Applications:
- Source assembly mounting in PVD chambers
- AMAT Endura 5500/6000 series PVD platforms
- Sputtering processes requiring high mechanical stability
- 200mm/300mm wafer deposition systems
