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AMAT 0040-49556
- Brand & Part Number: Applied Materials (AMAT) 0040-49556
- Product Name: Chamber Pedestal Base Plate
- Product Description: A heavy-duty precision base plate that supports the wafer pedestal assembly within process chambers. It provides stable mounting, thermal management, and precise alignment for heating and clamping components.
Detailed content
- Technical Specifications:
- Material: 316L stainless steel
- Dimensions: 400mm diameter × 30mm thickness
- Surface Finish: Electropolished (Ra ≤ 0.4μm)
- Flatness: ≤ 5μm across mounting surface
- Cooling Channels: Internal spiral coolant passages
- Mounting: 12 equally spaced M8 threaded holes
- Weight: 8.2kg
- Functional Features:
- Exceptional structural rigidity supports heavy pedestal assemblies
- Precision flatness ensures optimal thermal contact
- Internal cooling channels maintain temperature stability
- Electropolished surface minimizes particle adhesion
- Corrosion-resistant stainless steel construction
- Precision alignment features guarantee accurate assembly
- Applications:
- Pedestal mounting in CVD and PVD chambers
- AMAT Centura and Producer series platforms
- High-temperature wafer processing systems
- Applications requiring stable, cooled pedestal support
