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AMAT 0040-47830

  • Product Name: Plate, Source Frame
  • Product Description: Structural support plate for mounting plasma source components in 300mm PVD process chambers.
  • Technical Specifications:
    • Material: 6061-T6 aluminum alloy
    • Dimensions: 450mm x 450mm x 12.7mm
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Detailed content

    • Surface Finish: Hard anodized (25μm thickness)
    • Flatness Tolerance: ±0.02mm across entire surface
    • Mounting Holes: Precision drilled and tapped (M6)
    • Weight: 4.8kg
  • Functional Features:
    • Provides rigid structural support for source components
    • Ensures precise alignment of plasma source elements
    • Excellent thermal conductivity for heat dissipation
    • Corrosion resistant anodized coating
    • Lightweight yet high-strength design
  • Application Scenarios:
    • Used in AMAT 300mm Endura PVD chambers
    • Applied in physical vapor deposition processes
    • Deployed in metal sputtering applications
    • Utilized in semiconductor wafer metallization
    • Suitable for high-vacuum manufacturing environments

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