Digital guide
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AMAT 0040-44797-011
Product Name: Heated Gas Injector Assembly
Product Description: An integrated heated gas injector designed to deliver preheated process gases into semiconductor deposition chambers, preventing precursor condensation.
Technical Specifications:
- Material: High-purity 316L stainless steel with quartz nozzle
Detailed content
- Heating Capacity: 200W, up to 180°C controlled temperature
- Temperature Sensor: Integrated PT100 RTD feedback
- Gas Connections: Dual 1/8″ VCR inlets, single outlet nozzle
- Voltage: 240V AC
Functional Features:
- Maintains precise gas temperature to ensure consistent vaporization.
- Uniform heat distribution eliminates cold spots and condensation.
- High-purity materials prevent contamination of process gases.
- Direct-mount design for easy installation in chamber gas injection ports.
Application Scenarios: Delivery of metal-organic precursors and reactive gases in MOCVD, ALD, and CVD processes for thin-film deposition.
