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AMAT 0040-43978 Sensing and Monitoring Assembly
Product Description: It is a sensing and monitoring matching component used in semiconductor equipment, which is used to assist the sensor to install, position and protect, and ensure the accuracy and stability of temperature, pressure, position and other parameters detection.
Technical Specifications:
- Compatible with standard sensors of semiconductor equipment
Detailed content
- Material: high temperature resistance, corrosion resistance, low pollution
- Structural accuracy: high matching accuracy with the sensor and chamber
- Sealing performance: good vacuum sealing performance
Functional Features:
- Protect the sensor from plasma and chemical corrosion
- Ensure the sensor is in the best measuring position
- Easy to install and calibrate
- Stable performance and long service life
Application Scenarios:
- Temperature, pressure and position monitoring of process chamber
- Vacuum equipment and gas transmission system
- Semiconductor equipment process parameter monitoring system
- Sensor maintenance and replacement supporting parts
