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AMAT 0040-42026
Product Name: Top Blank-Off Base Ring Plate
Product Description: A high-precision machined metal structural plate that functions as a blank-off cover and base ring for semiconductor process chamber ports or openings. It provides a vacuum-tight seal, structural support, and mounting interface for chamber components.
Technical Specifications:
- Material: 6061-T6 Aluminum / 316L Stainless Steel
Detailed content
- Surface Finish: Electropolished, Ra ≤ 0.8μm
- Flatness: ≤ 0.02mm across entire surface
- Flange Compatibility: ISO-160 / DN160
- Temperature Rating: -20°C to +150°C
- Vacuum Rating: 10⁻⁹ Torr ultra-high vacuum compatible
Functional Features:
- Precision-drilled mounting holes for accurate alignment
- O-ring groove design for reliable vacuum sealing
- Low outgassing material for cleanroom compatibility
- High structural rigidity to prevent chamber distortion
- Corrosion resistance to process gases and plasmas
Application Scenarios: Used as a blanking plate for unused ports, or as a base ring for mounting components in 300mm PVD, CVD, and Etch chambers (Producer SE, Centura platforms).
