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AMAT 0040-41061
Product Name: Chamber Liner Weldment
Product Description: A one-piece, cylindrical stainless steel liner that lines the inner chamber wall. It protects the chamber body from deposition buildup and simplifies maintenance.
Technical Specifications:
- Material: 316L stainless steel (electropolished)
Detailed content
- Dimensions: 420mm ID x 450mm OD x 300mm height
- Wall Thickness: 6mm
- Features: Integrated pump-out slot, alignment tabs
- Surface Finish: Electropolished (Ra < 0.8μm)
- Leak Rate: < 1 x 10⁻⁹ mbar·l/s
- Weight: 12.5 kg
Key Features:
- Seamless construction eliminates trap sites for particles
- Easy to remove and clean during PM
- Resists film adhesion for longer service intervals
- Precision fit reduces pump-down time
- Compatible with all chamber cleaning chemistries
Application Scenarios:
Installed in AMAT Producer & Centura PECVD chambers. Used for depositing dielectric films (SiO₂, SiNₓ) on 200mm/300mm wafers.
