Digital guide
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AMAT 0040-40145
- Product Name: Manifold Block, Gas Distribution, Ultra-High Purity (UHP)
- Product Description: Precision-machined stainless steel manifold for distributing ultra-high purity process gases in semiconductor gas delivery systems.
- Technical Specifications:
- Material: 316L VAR (Vacuum Arc Remelted) stainless steel
Detailed content
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- Configuration: Multi-port (6-port) distribution manifold
- Connection Type: 1/4″ VCR face-seal fittings
- Pressure Rating: 3,000 PSI (207 bar)
- Temperature Range: -73°C to +450°C
- Surface Finish: Internal electropolish, Ra ≤ 0.4 μm
- Cleaning: Class 10 cleanroom assembled, double-bagged
- Functional Features:
- Metal-to-metal face-seal connections ensure zero-leak performance
- Low internal volume for rapid gas purging and reduced waste
- Electropolished surfaces minimize particle entrapment and contamination
- High corrosion resistance to all UHP semiconductor process gases
- Compact design for dense integration in gas cabinets
- Reusable, robust construction for long service life
- Application Scenarios:
- Used in AMAT gas panels and distribution systems
- Deployed in UHP gas delivery for semiconductor fabs
- Applied for distribution of corrosive, pyrophoric, and toxic gases
- Utilized in Centura and Endura process tool gas hookups
- Integrated into wafer fabrication facility gas distribution infrastructure
