Digital guide
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AMAT 0040-39551
Product Description: A high-performance electrical insulation ring surrounding electrostatic chucks (ESC), providing electrical isolation, thermal management and physical protection for wafer support assemblies in vacuum process chambers.
Technical Specifications:
- Material: High-performance ceramic or modified engineering polymer
Detailed content
- Dielectric Strength: ≥20kV/mm
- Thermal Conductivity: Optimized for balanced heat dissipation
- Dimensional Precision: Tight tolerance for concentric installation with ESC
- Temperature Range: -20℃ to 300℃ continuous operation
Functional Features:
- Provides reliable electrical isolation to prevent arcing and current leakage
- Stabilizes temperature distribution around the electrostatic chuck
- Low outgassing and particle generation for vacuum compatibility
- High wear resistance and long service life under cyclic working conditions
- Perfect matching with ESC structure to avoid process interference
Application Scenarios: Integrated with electrostatic chucks in PVD, Etch and ALD chambers for 200mm and 300mm wafer semiconductor processes.
