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AMAT 0040-21377 Wafer Handling Robot End Effector
Product Introduction: This is a high-precision wafer handling end effector, which is the core execution part of the automatic wafer transmission system. It can realize non-damage, high-speed and high-precision transmission of 200mm and 300mm wafers between different process chambers, ensuring the stability and efficiency of the whole semiconductor production line. It adopts anti-static, low-particle and high-rigidity design, which is suitable for high vacuum and ultra-clean environment.
Technical Specifications:
- Applicable Wafer Size: 200mm and 300mm silicon wafer
Detailed content
- Positioning Accuracy: ±0.05 mm, ensuring accurate wafer placement
- Gripping Force: 5–20 N adjustable, non-damage to wafer edge
- Material: Carbon fiber composite main body, ceramic contact pad, titanium alloy fastener
- Vacuum Compatibility: Can work stably in 10⁻⁷ Torr high vacuum environment
- Single Transmission Period: <2 seconds, adapting to high-throughput production line
- Weight: 1.2 kg, lightweight design reduces the load of the robot arm
Functional Features:
- Vacuum adsorption + mechanical auxiliary positioning, with dual safety detection
- Automatic centering function, ensuring wafer position consistency during transmission
- Anti-static and anti-pollution treatment, avoiding ESD damage and particle pollution
- Modular design, wearing parts can be replaced quickly, reducing maintenance time
- High rigidity and low deformation, ensuring stability in high-speed movement
- Compatible with mainstream semiconductor cluster equipment such as AMAT Endura®, Centura®
Application Scenarios:
- Automatic wafer loading and unloading of PVD, CVD, ALD and other coating equipment
- Wafer transmission between multiple process chambers in cluster equipment
- Wafer transmission in wafer detection and metrology equipment
- 300mm wafer mass production line and advanced process R&D platform
- Wafer transmission system in semiconductor packaging and testing equipment
