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Detailed content
- Pore Size: 0.003μm (3 nanometers)
- Flow Rate: 50 SLPM (standard liters per minute)
- Material: 316L VIM-VAR stainless steel
- Connection: 1/4″ VCR face seal fittings
- Pressure Rating: Vacuum to 200 PSI
- Temperature Range: -73°C to +450°C
Functional Features:
- Removes sub-micron particulates from process gases
- High flow capacity with minimal pressure drop
- All-welded construction for zero leakage
- Easy replacement of filter elements
- Full material traceability to SEMI standards
Application Scenarios:
- Ultra-high purity gas purification in semiconductor fabs
- Process gas filtration for CVD and ALD systems
- Gas line filtration for reactive and corrosive gases
- Centura and Endura platform gas delivery subsystems
