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AMAT 0040-08376

  • Product Name: Precision Bellows Assembly
  • Product Description: A multi-ply, flexible metal bellows assembly for vacuum motion feedthroughs, providing hermetic sealing while allowing linear or rotational movement.
  • Technical Specifications:
    • Material: 316L stainless steel, 10-ply convoluted design.
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Detailed content

    • Length: 150mm (compressed) to 225mm (extended).
    • Stroke: 75mm linear travel.
    • Pressure Rating: Full vacuum to 10 bar (gauge).
    • Connections: 50mm ISO-K (NW) flanges both ends.
  • Functional Features:
    • Exceptional flex life (1,000,000+ cycles).
    • Zero leakage under full vacuum and pressure cycling.
    • High lateral and angular misalignment compensation.
    • Bakeable up to 250°C for UHV applications.
  • Application Scenarios: Used in slit valve actuators, gate valves, and wafer lift mechanisms on Centura, Endura, and Reflexion platforms.

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