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AMAT 0040-03608
Product Name: High-Precision Vacuum Chamber Structural Component Assembly
Product Description: This is a precision-machined core structural assembly for semiconductor vacuum process chambers, widely used in PVD, CVD and etching systems. It provides stable mechanical support and airtight sealing for the internal environment of the chamber, ensuring the stability of the process under ultra-high vacuum and plasma conditions.
Technical Specifications:
- Main material: high-purity 6061-T6 aluminum alloy with precision CNC machining
Detailed content
- Surface treated with anodization and passivation to reduce particle generation
- Dimensional tolerance control within ±0.005mm to ensure vacuum sealing performance
- Withstands working temperature range: -20°C to 300°C
- Compatible with ultra-high vacuum environment down to 10⁻⁹ Torr
- Resistant to corrosion from common process gases such as fluorine and oxygen plasma
Functional Characteristics:
- Maintains long-term airtightness and structural stability under vacuum and thermal cycling
- Provides precise positioning and installation reference for internal electrodes, showerheads and sensors
- Low outgassing rate, effectively reducing chamber contamination and wafer defects
- High structural rigidity, avoiding deformation affecting process uniformity
- Easy to disassemble and assemble, convenient for equipment preventive maintenance
Application Scenarios:
- Internal structural components of PVD chambers on Endura platform
- Support and sealing parts of CVD process chambers
- Key structural parts of dielectric etching and metal etching chambers
- Vacuum chamber assembly for advanced logic and memory chip manufacturing
