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AMAT 0040-02937

Brand & Part Number: Applied Materials (AMAT) 0040-02937

Product Name: Chamber Flange / Adapter Ring

Product Description: A precision-machined metal flange that provides a vacuum-tight connection between different chamber modules or components.

Detailed content

Technical Specifications:
  • Material: 6061-T6 aluminum alloy or 304 stainless steel
  • Surface Finish: Electropolished internal surfaces (Ra ≤ 0.5 μm)
  • Seal Interface: Centering O-ring groove (elastomer or metal C-seal)
  • Vacuum Rating: Compatible with UHV (10⁻⁹ Torr)

    Functional Features:

  • Rigid construction maintains alignment under vacuum
  • Precision bolt pattern for uniform compression of seals
  • Low outgassing materials
  • Easy installation and alignment

    Application: Used to connect process chambers, vacuum pumps, and transfer modules on Centura and Producer platforms.

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