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AMAT 0040-02154
Product Name: Chamber Liner Assembly
Product Description: A precision-machined metallic liner that forms the interior surface of a process chamber, protecting the chamber body and ensuring process purity.
Technical Specifications:
- Material: High-grade 316L Stainless Steel or Aluminum.
Detailed content
- Surface Treatment: Electropolished or coated (e.g., Yttrium oxide) for plasma resistance.
- Design: Precision-fit with mounting slots and gas flow channels.
Functional Features:
- Contamination Control: Acts as a consumable barrier, preventing process byproducts from damaging the main chamber.
- Process Uniformity: Optimized geometry ensures consistent gas flow and plasma distribution.
- Easy Replacement: Designed for quick removal and replacement to reduce PM time.
- Corrosion Resistance: Highly resistant to etching byproducts and cleaning chemistries.
Application: Found in Etch, Deposition, and Implant chambers, protecting the vacuum environment and maintaining process repeatability.
