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AMAT 0040-01784
Product Name: Chamber Body / Vacuum Enclosure Section
Product Description: A heavy-duty, precision-machined main chamber body that forms the structural core of the semiconductor process module. It provides a vacuum-tight vessel, mounting interface for all internal components, and structural rigidity.
Technical Specifications:
- Material: Forged 6061-T6 aluminum alloy or 316L stainless steel
Detailed content
- Vacuum Rating: UHV compatible, leak rate < 5 x 10⁻¹⁰ mbar·l/s
- Surface Finish: Internal electropolished (Ra < 0.8μm), external painted
- Port Configuration: Multiple CF-flanged ports for pumps, gauges, and feedthroughs
- Dimensional Tolerance: ± 0.02mm for critical mounting surfaces
- Weight: Optimized for strength while minimizing thermal mass
Key Features:
- One-piece solid construction eliminates leak paths
- Rigid design maintains alignment under thermal and vacuum loads
- Precision port alignment ensures easy component installation
- Low outgassing materials maintain UHV cleanliness
- Designed for full bake-out up to 150°C
Application Scenarios:
Serves as the main vacuum vessel for AMAT P5000 and Centura 5200 series CVD/etch chambers. Forms the foundation for deposition, etch, and thermal process modules.
